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Countermeasure against Molecular Contamination

Category:relating to "Countermeasure against Molecular Contamination"

  • Cleanroom Technologies

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Cleanroom Planning, Construction, and Verification for Best Contamination Prevention

Based on our vast expertise, unique technologies, and proprietary databases, we provide AMC-proof cleanrooms that are fit just for your requirements.

* AMCs = Airborne Molecular Contaminants

Our Concept of Chemical Molecular Contamination Countermeasures [Planning Construction Verification]

High-precision analysis of airborne chemical components for cleanrooms

To achieve a highly precise trace analysis of airborne chemical components in a completed cleanroom, it is necessary to minimize chemical contaminations due to human sampling intervention.
To address this challenge, we have developed a high-precision analytical system for airborne chemical components, which has been utilized to analyze airborne chemicals in a large number of cleanrooms. Our analytical system for airborne chemical components can analyze any cleanroom in the world.

Chemical components produced in cleanrooms

The airborne chemical contamination sources in a cleanroom include the construction materials of the room, staff members in the room, and process gases and chemical solutions. The following table lists the chemical components stemming from sources such as cleanroom construction materials.

Generation Source Generated Substance
Outside air NOx, SOx, Na, Cl, and Ca
Prefilter and medium-performance filter (Non-cloth / Non-glass) P (Ester Phosphate as a Flame-resistant Material)
HEPA & ULPA (Glass fiber), and thermally insulated, sound-deadening material B, DBP, siloxane, toluene, xylene, benzenes - Generating from a filter paper binder, hotmelt, and packing
Chemical filter Acetic acid is generated by the reaction of PGMEA in a process solvent with the acidic function in a chemical filter for base component reduction
EPDM (Ethylene-propylene-diene Monomer) rubber packing Paraffinic material
Resin coated metal plate (Cabinet of Air-conditioning Equipment, Coil fin, etc.) Paraffin; In rare cases, large amounts of organic substances have been generated.
Soft resin sheet (Vinyl Chloride Curtains) DBP, DOP, phenols, benzenes, and dozens of other substances
Wire coating material (Non-eco Cable) Organic phosphorus, DOP (a plasticizer), and siloxane
Electric machinery Siloxane, lacquer, and fats and oils for lubrication
Paint (Antistatic and Dustproof) Various metallic ions, benzenes, and fats
Partition (Composite Board) Ethanol, etc. (Verify the Temperature and Time of Baking)
Concrete NH3 and Ca
Silicon caulking agent Siloxane, aldehydes, benzenes, toluene, etc.
Antistatic material (Wall, Floor, and Cabinet of Manufacturing Equipment) C, Na, NO2, Ca, Fe, K, Co, amines, sulfonic acid, etc.
Human NH3, acetone, Na, and Cl
Shoes and cosmetics Various organic substances
Steam for humidification AMP (Added as Antiscales for Boilers)

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