Chemical Contamination Prevention System

Industrial Clean Room (ICR) Technology | Countermeasures Against Molecular Contamination Technology

Taikisha's Technology

What is Industrial Clean Room (ICR) technology?

Low-Cost, Low-Energy component techniques or total engineering technologies that electronics industry requires; air cleanliness, high-precision temperature, humidity and airflow environments, and countermeasures against molecular contamination or microscopic vibration.

What is molecular contamination control technology?

Comprehensive countermeasures for molecular contaminants to be removed from production environments in ICR, such as prevention of external incursion, internal generation from building or facility materials, and so as rapid removal of generated pollutants.

Can provide solutions to these problems

  • Want to eliminate harmful substances/viruses
  • Want to lift productivity


Based on our vast expertise, unique technologies, and proprietary databases, we provide AMC-proof cleanrooms that are fit just for your requirements.
Our design and construction technologies allow us to select equipment and materials with few chemical contaminants to meet our customers' needs, and to quickly remove chemical contamination occurred during construction work.

Our Concept of Chemical Molecular Contamination Countermeasures

Our original air outgassing database allows us to predict indoor concentrations assuming actual environments, so that we can examine appropriate measures. Our original materials outgassing database and wafer deposit substance analysis and evaluation allow us to select materials that generate low amounts of molecular contamination, for early removal in each stage of the construction process from chemical cleanup. This reduces the level of molecular contamination and removes it quickly. This is the optimal chemical reducing device, employing Taikisha's diverse track record and original experimental data to select highly efficient outside-air pretreatment air washers and the best chemical filters.


  • High-precision analysis of airborne chemical components for cleanrooms

    To achieve a highly precise trace analysis of airborne chemical components in a completed cleanroom, it is necessary to minimize chemical contaminations due to human sampling intervention. To address this challenge, we have developed a high-precision analytical system for airborne chemical components, which has been utilized to analyze airborne chemicals in a large number of cleanrooms. Our analytical system for airborne chemical components can analyze any cleanroom in the world.

Chemical Components Produced in Cleanrooms

The airborne chemical contamination sources in a cleanroom include the construction materials of the room, staff members in the room, and process gases and chemical solutions. The following table lists the chemical components stemming from sources such as cleanroom construction materials.

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Generation Source Generated Substance
Outside air NOx, SOx, Na, Cl, and Ca
Prefilter and medium-performance filter (Non-cloth / Non-glass) P (Ester Phosphate as a Flame-resistant Material)
HEPA & ULPA (Glass fiber), and thermally insulated, sound-deadening material B, DBP, siloxane, toluene, xylene, benzenes - Generating from a filter paper binder, hotmelt, and packing
Chemical filter Acetic acid is generated by the reaction of PGMEA in a process solvent with the acidic function in a chemical filter for base component reduction
EPDM (Ethylene-propylene-diene Monomer) rubber packing Paraffinic material
Resin coated metal plate (Cabinet of Air-conditioning Equipment, Coil fin, etc.) Paraffin; In rare cases, large amounts of organic substances have been generated.
Soft resin sheet (Vinyl Chloride Curtains) DBP, DOP, phenols, benzenes, and dozens of other substances
Wire coating material (Non-eco Cable) Organic phosphorus, DOP (a plasticizer), and siloxane
Electric machinery Siloxane, lacquer, and fats and oils for lubrication
Paint (Antistatic and Dustproof) Various metallic ions, benzenes, and fats
Partition (Composite Board) Ethanol, etc. (Verify the Temperature and Time of Baking)
Concrete NH3 and Ca
Silicon caulking agent Siloxane, aldehydes, benzenes, toluene, etc.
Antistatic material (Wall, Floor, and Cabinet of Manufacturing Equipment) C, Na, NO2, Ca, Fe, K, Co, amines, sulfonic acid, etc.
Human NH3, acetone, Na, and Cl
Shoes and cosmetics Various organic substances
Steam for humidification AMP (Added as Antiscales for Boilers)